组分名称及浓度范围
平衡气
CO 300 ~ 500ppm H2 80 ~ 1000ppm CO2 500 ~ 1000ppm CH4 1000ppm ~ 1% C2H4 30 ~ 500ppm C2H6 30 ~ 500ppm C2H2 30 ~ 500ppm
N2 或 Ar
